Haruo Tsuchikawa

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Yokohama, JP

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Patents Grantslast 30 patents

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Scanning electron beam exposure system
- Patent number 4,968,893
- Issue date Nov 6, 1990
- Fujitsu Limited
- Hiroshi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure apparatus
- Patent number 4,585,943
- Issue date Apr 29, 1986
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for an electron beam exposure system
- Patent number 4,586,141
- Issue date Apr 29, 1986
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Deflection system in an electron beam exposure device
- Patent number 4,583,077
- Issue date Apr 15, 1986
- Fujitsu Limited
- Hiroshi Yasuda
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Scanning electron beam exposure system
- Patent number 4,516,030
- Issue date May 7, 1985
- Fujitsu Limited
- Haruo Tsuchikawa
- B82 - NANO-TECHNOLOGY