Haruto KANAMORI

Person

  • Miyagi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method

    • Patent number 9,922,841
    • Issue date Mar 20, 2018
    • Tokyo Electron Limited
    • Ryosuke Niitsuma
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING METHOD

    • Publication number 20160172212
    • Publication date Jun 16, 2016
    • TOKYO ELECTRON LIMITED
    • Ryosuke NIITSUMA
    • H01 - BASIC ELECTRIC ELEMENTS