TREA

Haruyuki Takano

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  • Miyagi-ken, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching device
    • Patent number 8,114,245
    • Issue date Feb 14, 2012
    • Tokyo Electron Limited
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma method with high input power
    • Patent number 7,312,415
    • Issue date Dec 25, 2007
    • Foundation for Advancement of International Science
    • Tadahiro Ohmi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma etching device
    • Patent number 6,585,851
    • Issue date Jul 1, 2003
    • Tokyo Electron Limited
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma device
    • Patent number 6,357,385
    • Issue date Mar 19, 2002
    • Tadahiro Ohmi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Parallel plate sputtering device with RF powered auxiliary electrod...
    • Patent number 6,153,068
    • Issue date Nov 28, 2000
    • Ohmi; Tadahiro
    • Tadahiro Ohmi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma device
    • Publication number 20050250338
    • Publication date Nov 10, 2005
    • Tadahiro OHMI
    • Tadahiro Ohmi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma etching device
    • Publication number 20030121609
    • Publication date Jul 3, 2003
    • Tadahiro Ohmi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma device
    • Publication number 20020164883
    • Publication date Nov 7, 2002
    • Tadahiro Ohmi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...