Hatsuyuki Arai

Person

Zama-city, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Carrier and polishing apparatus
- Patent number 6,110,026
- Issue date Aug 29, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,074,277
- Issue date Jun 13, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece surface processing apparatus
- Patent number 6,068,545
- Issue date May 30, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Planarization method, workpiece measuring method, and surface plana...
- Patent number 6,066,230
- Issue date May 23, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad control method and apparatus
- Patent number 6,040,244
- Issue date Mar 21, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical and mechanical polishing apparatus
- Patent number 6,030,488
- Issue date Feb 29, 2000
- Speedfam Co., Ltd.
- Shigeto Izumi
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier and CMP apparatus
- Patent number 6,012,964
- Issue date Jan 11, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for applying an urging force to a wafer
- Patent number 5,916,009
- Issue date Jun 29, 1999
- Speedfam Co., Ltd.
- Shigeto Izumi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing control method
- Patent number 5,685,766
- Issue date Nov 11, 1997
- Speedfam Corporation
- Wayne Mattingly
- B24 - GRINDING POLISHING
Information Patent Grant
Flattening method and flattening apparatus of a semiconductor device
- Patent number 5,605,499
- Issue date Feb 25, 1997
- Speedfam Company Limited
- Misuo Sugiyama
- B24 - GRINDING POLISHING
Information Patent Grant
Flat lapping machine with sizing mechanism
- Patent number 5,099,614
- Issue date Mar 31, 1992
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Flat lapping machine
- Patent number 4,805,348
- Issue date Feb 21, 1989
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Reinforced CMP carrier bladders
- Publication number 20020077049
- Publication date Jun 20, 2002
- SpeedFam-IPEC Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING

Hatsuyuki Arai

Person

Patents Grantslast 30 patents

Carrier and polishing apparatus

Polishing apparatus

Workpiece surface processing apparatus

Planarization method, workpiece measuring method, and surface plana...

Polishing pad control method and apparatus

Chemical and mechanical polishing apparatus

Carrier and CMP apparatus

Apparatus for applying an urging force to a wafer

Polishing control method

Flattening method and flattening apparatus of a semiconductor device

Flat lapping machine with sizing mechanism

Flat lapping machine

Patents Applicationslast 30 patents

Reinforced CMP carrier bladders