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Yamanashi, JP
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last 30 patents
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Patent Grant
Cooling mechanism and processing system
Patent number
10,256,128
Issue date
Apr 9, 2019
Tokyo Electron Limited
Keita Kumagai
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
COOLING MECHANISM AND PROCESSING SYSTEM
Publication number
20150133044
Publication date
May 14, 2015
TOKYO ELECTRON LIMITED
Keita Kumagai
H01 - BASIC ELECTRIC ELEMENTS