Hayato Kimura

Person

Shizuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Data processing method, data processing apparatus, and multiple cha...
- Patent number 10,886,103
- Issue date Jan 5, 2021
- NuFlare Technology, Inc.
- Kei Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 10,483,087
- Issue date Nov 19, 2019
- NuFlare Technology, Inc.
- Kei Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drawing device and drawing method
- Patent number 10,475,621
- Issue date Nov 12, 2019
- NuFlare Technology, Inc.
- Kei Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diagnosis method, charged particle beam lithography apparatus, and...
- Patent number 10,109,454
- Issue date Oct 23, 2018
- NuFlare Technology, Inc.
- Kei Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam writing apparatus and multi-charged par...
- Patent number 9,953,800
- Issue date Apr 24, 2018
- NuFlare Technology, Inc.
- Kei Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 9,934,935
- Issue date Apr 3, 2018
- NuFlare Technology, Inc.
- Ryoichi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern writing circuit self-diagnosis method for charged beam phot...
- Patent number 7,900,185
- Issue date Mar 1, 2011
- Nuflare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Writing error diagnosis method for charged particle beam photolitho...
- Patent number 7,598,504
- Issue date Oct 6, 2009
- Nuflare Technology, Inc.
- Hayato Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam pattern writing method and apparatus and soft...
- Patent number 7,589,335
- Issue date Sep 15, 2009
- Nuflare Technology, Inc.
- Takuya Matsukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam drawing apparatus and charged beam drawing method
- Patent number 7,476,881
- Issue date Jan 13, 2009
- Nuflare Technology, Inc.
- Kiyoshi Hattori
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BLANKING APERTURE ARRAY SYSTEM, CHARGED PARTICLE BEAM WRITING APPAR...
- Publication number 20250037960
- Publication date Jan 30, 2025
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING APERTURE ARRAY SYSTEM AND CHARGED PARTICLE BEAM WRITING AP...
- Publication number 20240282550
- Publication date Aug 22, 2024
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE...
- Publication number 20240013999
- Publication date Jan 11, 2024
- NuFlare Technology, Inc.
- Toshiki KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA PROCESSING METHOD, DATA PROCESSING APPARATUS, AND MULTIPLE CHA...
- Publication number 20190378688
- Publication date Dec 12, 2019
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING DEVICE AND DRAWING METHOD
- Publication number 20180350560
- Publication date Dec 6, 2018
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180005799
- Publication date Jan 4, 2018
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIAGNOSIS METHOD, CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, AND...
- Publication number 20170243714
- Publication date Aug 24, 2017
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20170047194
- Publication date Feb 16, 2017
- NuFlare Technology, Inc.
- Ryoichi YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PAR...
- Publication number 20160322196
- Publication date Nov 3, 2016
- NuFlare Technology, Inc.
- Kei HASEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN WRITING CIRCUIT SELF-DIAGNOSIS METHOD FOR CHARGED BEAM PHOT...
- Publication number 20080067426
- Publication date Mar 20, 2008
- NuFlare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Application
WRITING ERROR DIAGNOSIS METHOD FOR CHARGED PARTICLE BEAM PHOTOLITHO...
- Publication number 20080067423
- Publication date Mar 20, 2008
- NuFlare Technology, Inc.
- Hayato Kimura
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS AND SOFT...
- Publication number 20080011965
- Publication date Jan 17, 2008
- NuFlare Technology, Inc.
- Takuya Matsukawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED BEAM DRAWING APPARATUS AND CHARGED BEAM DRAWING METHOD
- Publication number 20070114461
- Publication date May 24, 2007
- Kiyoshi HATTORI
- B82 - NANO-TECHNOLOGY

Hayato Kimura

Person

Patents Grantslast 30 patents

Data processing method, data processing apparatus, and multiple cha...

Multi charged particle beam writing apparatus and multi charged par...

Drawing device and drawing method

Diagnosis method, charged particle beam lithography apparatus, and...

Multi-charged particle beam writing apparatus and multi-charged par...

Multi charged particle beam writing apparatus and multi charged par...

Pattern writing circuit self-diagnosis method for charged beam phot...

Writing error diagnosis method for charged particle beam photolitho...

Charged-particle beam pattern writing method and apparatus and soft...

Charged beam drawing apparatus and charged beam drawing method

Patents Applicationslast 30 patents

BLANKING APERTURE ARRAY SYSTEM, CHARGED PARTICLE BEAM WRITING APPAR...

BLANKING APERTURE ARRAY SYSTEM AND CHARGED PARTICLE BEAM WRITING AP...

MOUNTING SUBSTRATE, BLANKING APERTURE ARRAY CHIP, BLANKING APERTURE...

DATA PROCESSING METHOD, DATA PROCESSING APPARATUS, AND MULTIPLE CHA...

DRAWING DEVICE AND DRAWING METHOD

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

DIAGNOSIS METHOD, CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, AND...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PAR...

PATTERN WRITING CIRCUIT SELF-DIAGNOSIS METHOD FOR CHARGED BEAM PHOT...

WRITING ERROR DIAGNOSIS METHOD FOR CHARGED PARTICLE BEAM PHOTOLITHO...

CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS AND SOFT...

CHARGED BEAM DRAWING APPARATUS AND CHARGED BEAM DRAWING METHOD