Hayato Sakai

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature control method and plasma processing apparatus
- Patent number 11,920,242
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Yuya Minoura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control medium processing apparatus and temperature con...
- Patent number 11,835,278
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- Hayato Sakai
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,817,334
- Issue date Nov 14, 2023
- Tokyo Electron Limited
- Haruka Kaneko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONTROL MEDIUM PROCESSING APPARATUS AND TEMPERATURE CON...
- Publication number 20240053073
- Publication date Feb 15, 2024
- TOKYO ELECTRON LIMITED
- Hayato Sakai
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
TEMPERATURE CONTROL SYSTEM AND SYSTEM OF PROCESSING SUBSTRATE
- Publication number 20240038555
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Haruka Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210287886
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Yuya Minoura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL MEDIUM PROCESSING APPARATUS AND TEMPERATURE CON...
- Publication number 20210270508
- Publication date Sep 2, 2021
- TOKYO ELECTRON LIMITED
- Hayato Sakai
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210257235
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Haruka Kaneko
- H01 - BASIC ELECTRIC ELEMENTS