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He Hui Peng

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  • Changhua City, TW
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER POLISHING HEAD, SYSTEM THEREOF, AND METHOD USING THE SAME
    • Publication number 20230211452
    • Publication date Jul 6, 2023
    • Taiwan Semiconductor Manufacturing company Ltd.
    • JAMES JENG-JYI HWANG
    • B24 - GRINDING POLISHING
  • Information Patent Application

    METHOD FOR POLISHING SEMICONDUCTOR SUBSTRATE
    • Publication number 20220384198
    • Publication date Dec 1, 2022
    • Taiwan Semiconductor Manufacturing company Ltd.
    • JAMES JENG-JYI HWANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR METAL GATE SURFACE CLEAN
    • Publication number 20220359189
    • Publication date Nov 10, 2022
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Shich-Chang SUEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER POLISHING HEAD, SYSTEM THEREOF, AND METHOD USING THE SAME
    • Publication number 20210220965
    • Publication date Jul 22, 2021
    • Taiwan Semiconductor Manufacturing company Ltd.
    • JAMES JENG-JYI HWANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method for Metal Gate Surface Clean
    • Publication number 20210082688
    • Publication date Mar 18, 2021
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Shich-Chang SUEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
    • Publication number 20200039019
    • Publication date Feb 6, 2020
    • Taiwan Semiconductor Manufacturing company Ltd.
    • JAMES JENG-JYI HWANG
    • B24 - GRINDING POLISHING
  • Information Patent Application

    APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
    • Publication number 20190375071
    • Publication date Dec 12, 2019
    • Taiwan Semiconductor Manufacturing company Ltd.
    • HE HUI PENG
    • B24 - GRINDING POLISHING
  • Information Patent Application

    Method For Metal Gate Surface Clean
    • Publication number 20170221700
    • Publication date Aug 3, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Shich-Chang SUEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method For Metal Gate Surface Clean
    • Publication number 20160172186
    • Publication date Jun 16, 2016
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Shich-Chang SUEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    BRUSH CLEANING METHOD
    • Publication number 20150335146
    • Publication date Nov 26, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Ming HUANG
    • A46 - BRUSHWARE
  • Information Patent Application

    Method For Metal Gate Surface Clean
    • Publication number 20150200089
    • Publication date Jul 16, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Shich-Chang SUEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PARTICLE REMOVAL
    • Publication number 20150107619
    • Publication date Apr 23, 2015
    • Taiwan Semiconductor Manufacturing Company Limited
    • Jiann Lih Wu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MECHANISMS FOR REMOVING DEBRIS FROM POLISHING PAD
    • Publication number 20150024661
    • Publication date Jan 22, 2015
    • Taiwan Semiconductor Manufacturing Co., LTD
    • He-Hui PENG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    BRUSH CLEANING SYSTEM
    • Publication number 20130192634
    • Publication date Aug 1, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fu-Ming HUANG
    • A46 - BRUSHWARE
  • Information Patent Application

    Semiconductor Device Surface Clean
    • Publication number 20130061876
    • Publication date Mar 14, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Shich-Chang Suen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Process for Forming Contact Plugs
    • Publication number 20130065394
    • Publication date Mar 14, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Shich-Chang Suen
    • H01 - BASIC ELECTRIC ELEMENTS