He Zhang

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer etch and deposition processing systems including a len...
- Patent number 11,984,330
- Issue date May 14, 2024
- Lam Research Corporation
- Dong Woo Paeng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isotropic etching of film with atomic layer control
- Patent number 10,224,212
- Issue date Mar 5, 2019
- Lam Research Corporation
- Yunsang Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MODIFICATION OF METAL-CONTAINING SURFACES IN HIGH ASPECT RATIO PLAS...
- Publication number 20240420963
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- He Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATE RF PULSING IN CYCLING RECIPES TO REDUCE CHARGING INDUCE...
- Publication number 20240242935
- Publication date Jul 18, 2024
- LAM RESEARCH CORPORATION
- He Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROFILE TWISTING CONTROL IN DIELECTRIC ETCH
- Publication number 20240105432
- Publication date Mar 28, 2024
- LAM RESEARCH CORPORATION
- Neil Macaraeg Mackie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL ATOMIC LAYER ETCH AND DEPOSITION APPARATUSES AND PROCESSES WI...
- Publication number 20220084838
- Publication date Mar 17, 2022
- He ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCH SYSTEMS FOR SELECTIVELY ETCHING WITH HALOGEN-BASE...
- Publication number 20220005740
- Publication date Jan 6, 2022
- LAM RESEARCH CORPORATION
- Dong Woo PAENG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ATOMIC LAYER ETCH AND DEPOSITION PROCESSING SYSTEMS INCLUDING A LEN...
- Publication number 20210143032
- Publication date May 13, 2021
- LAM RESEARCH CORPORATION
- Dong Woo PAENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOTROPIC ETCHING OF FILM WITH ATOMIC LAYER CONTROL
- Publication number 20180218915
- Publication date Aug 2, 2018
- LAM RESEARCH CORPORATION
- Yunsang KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING DESTINATION SUGGESTIONS
- Publication number 20170111458
- Publication date Apr 20, 2017
- FACEBOOK, INC.
- Yu Huang
- G06 - COMPUTING CALCULATING COUNTING

Person

Patents Grantslast 30 patents

Atomic layer etch and deposition processing systems including a len...

Isotropic etching of film with atomic layer control

Patents Applicationslast 30 patents

MODIFICATION OF METAL-CONTAINING SURFACES IN HIGH ASPECT RATIO PLAS...

MULTI-STATE RF PULSING IN CYCLING RECIPES TO REDUCE CHARGING INDUCE...

PROFILE TWISTING CONTROL IN DIELECTRIC ETCH

METAL ATOMIC LAYER ETCH AND DEPOSITION APPARATUSES AND PROCESSES WI...

ATOMIC LAYER ETCH SYSTEMS FOR SELECTIVELY ETCHING WITH HALOGEN-BASE...

ATOMIC LAYER ETCH AND DEPOSITION PROCESSING SYSTEMS INCLUDING A LEN...

ISOTROPIC ETCHING OF FILM WITH ATOMIC LAYER CONTROL

SYSTEMS AND METHODS FOR PROVIDING DESTINATION SUGGESTIONS