Heath A. Pois

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for non-destructive metrology of thin layers
- Patent number 12,066,391
- Issue date Aug 20, 2024
- NOVA MEASURING INSTRUMENTS, INC.
- Wei Ti Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Characterizing and measuring in small boxes using XPS with multiple...
- Patent number 11,988,502
- Issue date May 21, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for non-destructive metrology of thin layers
- Patent number 11,906,451
- Issue date Feb 20, 2024
- Nova Ltd.
- Wei Ti Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for measuring a sample by x-ray reflectance scatt...
- Patent number 11,874,237
- Issue date Jan 16, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for monitoring deposition process
- Patent number 11,852,467
- Issue date Dec 26, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 11,733,035
- Issue date Aug 22, 2023
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for non-destructive metrology of thin layers
- Patent number 11,668,663
- Issue date Jun 6, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Wei Ti Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 11,029,148
- Issue date Jun 8, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,859,519
- Issue date Dec 8, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 10,648,802
- Issue date May 12, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for non-destructive metrology of thin layers
- Patent number 10,533,961
- Issue date Jan 14, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Wei Ti Lee
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,481,112
- Issue date Nov 19, 2019
- Nova Measuring Instruments Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,119,925
- Issue date Nov 6, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed-forward of multi-layer and multi-process information using XPS...
- Patent number 10,082,390
- Issue date Sep 25, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Silicon germanium thickness and composition determination using com...
- Patent number 9,952,166
- Issue date Apr 24, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Silicon germanium thickness and composition determination using com...
- Patent number 9,594,035
- Issue date Mar 14, 2017
- ReVera, Incorporated
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 9,588,066
- Issue date Mar 7, 2017
- ReVera, Incorporated
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution monitoring of CD variations
- Patent number 8,049,903
- Issue date Nov 1, 2011
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
High resolution monitoring of CD variations
- Patent number 7,933,026
- Issue date Apr 26, 2011
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
High resolution monitoring of CD variations
- Patent number 7,567,351
- Issue date Jul 28, 2009
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Multiple tool and structure analysis
- Patent number 7,478,019
- Issue date Jan 13, 2009
- KLA-Tencor Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR MONITORING DEPOSITION PROCESS
- Publication number 20240167814
- Publication date May 23, 2024
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. POIS
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20240085174
- Publication date Mar 14, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
EVALUATING X-RAY SIGNALS FROM A PERTURBED OBJECT
- Publication number 20240068964
- Publication date Feb 29, 2024
- NOVA LTD
- Shahar Gov
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS
- Publication number 20230408430
- Publication date Dec 21, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Wei Ti Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMALL SPOT
- Publication number 20230288196
- Publication date Sep 14, 2023
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR MONITORING DEPOSITION PROCESS
- Publication number 20220155064
- Publication date May 19, 2022
- Nova Measuring Instruments, Inc.
- Heath A. POIS
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS
- Publication number 20220074878
- Publication date Mar 10, 2022
- NOVA LTD
- Wei Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20210372787
- Publication date Dec 2, 2021
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...
- Publication number 20210164924
- Publication date Jun 3, 2021
- NOVA MEASURING INSTRUMENTS LTD.
- Heath POIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20200370885
- Publication date Nov 26, 2020
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS
- Publication number 20200191734
- Publication date Jun 18, 2020
- Nova Measuring Instruments, Inc.
- Wei Ti Lee
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20200088656
- Publication date Mar 19, 2020
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20190360800
- Publication date Nov 28, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20190086342
- Publication date Mar 21, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...
- Publication number 20190033069
- Publication date Jan 31, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS
- Publication number 20180328871
- Publication date Nov 15, 2018
- Nova Measuring Instruments, Inc.
- Wei Ti Lee
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS
- Publication number 20180172609
- Publication date Jun 21, 2018
- NOVA MEASURING INSTRUMENTS LTD.
- Wei Ti LEE
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20170176354
- Publication date Jun 22, 2017
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
SILICON GERMANIUM THICKNESS AND COMPOSITION DETERMINATION USING COM...
- Publication number 20170176357
- Publication date Jun 22, 2017
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
Feed-Forward of Multi-Layer and Multi-Process Information using XPS...
- Publication number 20170160081
- Publication date Jun 8, 2017
- ReVera, Incorporated
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
SILICON GERMANIUM THICKNESS AND COMPOSITION DETERMINATION USING COM...
- Publication number 20150308969
- Publication date Oct 29, 2015
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20150204802
- Publication date Jul 23, 2015
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
HIGH RESOLUTION MONITORING OF CD VARIATIONS
- Publication number 20110205554
- Publication date Aug 25, 2011
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
HIGH RESOLUTION MONITORING OF CD VARIATIONS
- Publication number 20090259605
- Publication date Oct 15, 2009
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
High resolution monitoring of CD variations
- Publication number 20070201017
- Publication date Aug 30, 2007
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
Multiple tool and structure analysis
- Publication number 20060167651
- Publication date Jul 27, 2006
- Shahin Zangooie
- G05 - CONTROLLING REGULATING

Heath A. Pois

Person

Patents Grantslast 30 patents

Method and system for non-destructive metrology of thin layers

Characterizing and measuring in small boxes using XPS with multiple...

Method and system for non-destructive metrology of thin layers

System and method for measuring a sample by x-ray reflectance scatt...

Method and system for monitoring deposition process

Feed-forward of multi-layer and multi-process information using XPS...

Method and system for non-destructive metrology of thin layers

Feed-forward of multi-layer and multi-process information using XPS...

Methods and systems for measuring periodic structures using multi-a...

Feed-forward of multi-layer and multi-process information using XPS...

Method and system for non-destructive metrology of thin layers

Methods and systems for measuring periodic structures using multi-a...

Methods and systems for measuring periodic structures using multi-a...

Feed-forward of multi-layer and multi-process information using XPS...

Silicon germanium thickness and composition determination using com...

Silicon germanium thickness and composition determination using com...

Methods and systems for measuring periodic structures using multi-a...

High resolution monitoring of CD variations

High resolution monitoring of CD variations

High resolution monitoring of CD variations

Multiple tool and structure analysis

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR MONITORING DEPOSITION PROCESS

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

EVALUATING X-RAY SIGNALS FROM A PERTURBED OBJECT

METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS

SMALL SPOT

METHOD AND SYSTEM FOR MONITORING DEPOSITION PROCESS

METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

FEED-FORWARD OF MULTI-LAYER AND MULTI-PROCESS INFORMATION USING XPS...

METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS

METHOD AND SYSTEM FOR NON-DESTRUCTIVE METROLOGY OF THIN LAYERS

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

SILICON GERMANIUM THICKNESS AND COMPOSITION DETERMINATION USING COM...

Feed-Forward of Multi-Layer and Multi-Process Information using XPS...

SILICON GERMANIUM THICKNESS AND COMPOSITION DETERMINATION USING COM...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

HIGH RESOLUTION MONITORING OF CD VARIATIONS

HIGH RESOLUTION MONITORING OF CD VARIATIONS

High resolution monitoring of CD variations

Multiple tool and structure analysis