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Heather Landis
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Tigard, OR, US
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last 30 patents
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Patent Grant
Systems and methods for vapor delivery in a substrate processing sy...
Patent number
9,970,108
Issue date
May 15, 2018
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
SYSTEMS AND METHODS FOR VAPOR DELIVERY
Publication number
20160032453
Publication date
Feb 4, 2016
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HARDWARE FOR THE SEPARATION AND DEGASSING OF DISSOLVED GASES IN SEM...
Publication number
20150380278
Publication date
Dec 31, 2015
LAM RESEARCH CORPORATION
Heather Landis
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL