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Hector Velasco
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Milpitas, CA, US
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last 30 patents
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Patent Grant
PECVD and CVD processes for WNx deposition
Patent number
6,635,570
Issue date
Oct 21, 2003
Carl J. Galewski
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Apparatus and methods for minimizing as-deposited stress in tungste...
Patent number
6,130,159
Issue date
Oct 10, 2000
Genus, Inc.
Sien G. Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods for minimizing as-deposited stress in tungsten silicide films
Patent number
5,963,836
Issue date
Oct 5, 1999
Genus, Inc.
Sien G. Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...