Hedong YANG

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning electron microscope objective lens calibration using X-Y v...
- Patent number 10,790,114
- Issue date Sep 29, 2020
- KLA-Tencor Corporation
- Ichiro Honjo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Unified neural network for defect detection and classification
- Patent number 10,607,119
- Issue date Mar 31, 2020
- KLA-Tencor Corp.
- Li He
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Contour based defect detection
- Patent number 10,395,362
- Issue date Aug 27, 2019
- KLA-Tencor Corp.
- Ajay Gupta
- G01 - MEASURING TESTING
Information Patent Grant
Contour-based array inspection of patterned defects
- Patent number 9,483,819
- Issue date Nov 1, 2016
- KLA-Tencor Corporation
- Chien-Huei Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Contour-based defect detection using an inspection apparatus
- Patent number 8,669,523
- Issue date Mar 11, 2014
- KLA-Tencor Corporation
- Chien-Huei Chen
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for classification of defects using surface h...
- Patent number 8,502,146
- Issue date Aug 6, 2013
- KLA-Tencor Corporation
- Chien-Huei Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated feature analysis with off-axis tilting
- Patent number 7,423,269
- Issue date Sep 9, 2008
- KLA-Tencor Technologies Corporation
- Amir Azordegan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-feature-dependent focusing
- Patent number 7,173,243
- Issue date Feb 6, 2007
- KLA-Tencor Technologies Corporation
- Hedong Yang
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron beam apparatus and methods of processing data fro...
- Patent number 6,995,369
- Issue date Feb 7, 2006
- KLA-Tencor Technologies Corporation
- Matthew Lent
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
NOISE DIAGNOSTICS FOR AN ELECTRON BEAM INSPECTION SYSTEM WITH SWATHING
- Publication number 20240068967
- Publication date Feb 29, 2024
- KLA Corporation
- Bo Xiong
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD OF FIBER LOCATION MAPPING IN A MULTI-BEAM SYSTEM
- Publication number 20230003615
- Publication date Jan 5, 2023
- KLA Corporation
- Sameet K. Shriyan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
UNIFIED NEURAL NETWORK FOR DEFECT DETECTION AND CLASSIFICATION
- Publication number 20190073568
- Publication date Mar 7, 2019
- KLA-Tencor Corporation
- Li He
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning Electron Microscope Objective Lens Calibration
- Publication number 20190004298
- Publication date Jan 3, 2019
- KLA-Tencor Corporation
- Ichiro Honjo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTOUR BASED DEFECT DETECTION
- Publication number 20180293721
- Publication date Oct 11, 2018
- KLA-Tencor Corporation
- Ajay Gupta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTOUR-BASED ARRAY INSPECTION OF PATTERNED DEFECTS
- Publication number 20140212024
- Publication date Jul 31, 2014
- KLA-Tencor Corporation
- Chien-Huei CHEN
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR CLASSIFICATION OF DEFECTS USING SURFACE H...
- Publication number 20130082174
- Publication date Apr 4, 2013
- Chien-Huei CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTOUR-BASED DEFECT DETECTION USING AN INSPECTION APPARATUS
- Publication number 20120298862
- Publication date Nov 29, 2012
- Chien-Huei CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR REAL-TIME THREE-DIMENSIONAL SEM IMAGING A...
- Publication number 20120223227
- Publication date Sep 6, 2012
- Chien-Huei CHEN
- G01 - MEASURING TESTING

Hedong YANG

Person

Patents Grantslast 30 patents

Scanning electron microscope objective lens calibration using X-Y v...

Unified neural network for defect detection and classification

Contour based defect detection

Contour-based array inspection of patterned defects

Contour-based defect detection using an inspection apparatus

Methods and apparatus for classification of defects using surface h...

Automated feature analysis with off-axis tilting

Non-feature-dependent focusing

Scanning electron beam apparatus and methods of processing data fro...

Patents Applicationslast 30 patents

NOISE DIAGNOSTICS FOR AN ELECTRON BEAM INSPECTION SYSTEM WITH SWATHING

SYSTEM AND METHOD OF FIBER LOCATION MAPPING IN A MULTI-BEAM SYSTEM

UNIFIED NEURAL NETWORK FOR DEFECT DETECTION AND CLASSIFICATION

Scanning Electron Microscope Objective Lens Calibration

CONTOUR BASED DEFECT DETECTION

CONTOUR-BASED ARRAY INSPECTION OF PATTERNED DEFECTS

METHODS AND APPARATUS FOR CLASSIFICATION OF DEFECTS USING SURFACE H...

CONTOUR-BASED DEFECT DETECTION USING AN INSPECTION APPARATUS

APPARATUS AND METHODS FOR REAL-TIME THREE-DIMENSIONAL SEM IMAGING A...