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Hee Jung YEOM
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Daejeon, KR
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Patents Grants
last 30 patents
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Patent Grant
Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis...
Patent number
11,867,643
Issue date
Jan 9, 2024
Korea Research Institute of Standards and Science
Hyo Chang Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for measuring plasma ion density and apparatus for diagnosin...
Patent number
11,735,397
Issue date
Aug 22, 2023
Korea Research Institute of Standards and Science
Hyo Chang Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DEVICE FOR MEASURING PLASMA ION DENSITY AND APPARATUS FOR DIAGNOSIN...
Publication number
20220270852
Publication date
Aug 25, 2022
Korea Research Institute of Standards and Science
Hyo Chang LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANAR-TYPE PLASMA DIAGNOSIS APPARATUS, WAFER-TYPE PLASMA DIAGNOSIS...
Publication number
20210116393
Publication date
Apr 22, 2021
Korea Research Institute of Standards and Science
Hyo Chang LEE
H01 - BASIC ELECTRIC ELEMENTS