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Heechul LEE
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Suwon-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Shower head assembly and plasma processing apparatus having the same
Patent number
11,488,804
Issue date
Nov 1, 2022
Samsung Electronics Co., Ltd.
Youngwon Shin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR MODULE
Publication number
20250233030
Publication date
Jul 17, 2025
Samsung Electronics Co., Ltd.
Hwanjoo Park
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SHOWER HEAD ASSEMBLY AND PLASMA PROCESSING APPARATUS HAVING THE SAME
Publication number
20200365373
Publication date
Nov 19, 2020
Samsung Electronics Co., Ltd.
Youngwon SHIN
H01 - BASIC ELECTRIC ELEMENTS