Heehwan KIM

Person

Sejong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for treating substrate, and nozzle unit
- Patent number 11,424,139
- Issue date Aug 23, 2022
- Semes Co., Ltd.
- Yong Hoon Hong
- B08 - CLEANING
Information Patent Grant
Sensors for detecting substitution between chemicals and methods of...
- Patent number 11,280,753
- Issue date Mar 22, 2022
- Samsung Electronics Co., Ltd.
- Daesung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Standby port and substrate processing apparatus having the same
- Patent number 10,825,699
- Issue date Nov 3, 2020
- Semes Co., Ltd.
- Buyoung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 10,707,101
- Issue date Jul 7, 2020
- Semes Co., Ltd.
- Heehwan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 10,304,687
- Issue date May 28, 2019
- Semes Co., Ltd.
- Soyoung Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Unit for supplying fluid, apparatus and method for treating substra...
- Patent number 10,109,506
- Issue date Oct 23, 2018
- Semes Co., Ltd.
- Heehwan Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL SUPPLY APPARATUS, METHOD FOR REMOVING PARTICLES FROM CHEMI...
- Publication number 20210130951
- Publication date May 6, 2021
- Semes Co., LTD.
- Yong Hoon HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE, AND NOZZLE UNIT
- Publication number 20210090911
- Publication date Mar 25, 2021
- SEMES CO., LTD.
- Yong Hoon HONG
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20210066099
- Publication date Mar 4, 2021
- SEMES CO., LTD.
- Muhyeon LEE
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20200406311
- Publication date Dec 31, 2020
- SEMES CO., LTD.
- Jeong Yeong PARK
- B08 - CLEANING
Information Patent Application
SENSORS FOR DETECTING SUBSTITUTION BETWEEN CHEMICALS AND METHODS OF...
- Publication number 20200386705
- Publication date Dec 10, 2020
- Samsung Electronics Co., Ltd.
- Daesung Jung
- G01 - MEASURING TESTING
Information Patent Application
STANDBY PORT AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
- Publication number 20190189471
- Publication date Jun 20, 2019
- SEMES CO., LTD.
- BUYOUNG JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20180061675
- Publication date Mar 1, 2018
- SEMES CO., LTD.
- Heehwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20180033632
- Publication date Feb 1, 2018
- SEMES CO., LTD.
- SOYOUNG PARK
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20180033655
- Publication date Feb 1, 2018
- SEMES CO., LTD.
- HEEHWAN KIM
- B08 - CLEANING
Information Patent Application
UNIT FOR SUPPLYING FLUID, APPARATUS AND METHOD FOR TREATING SUBSTRA...
- Publication number 20170345687
- Publication date Nov 30, 2017
- SEMES CO., LTD.
- HEEHWAN KIM
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20170312794
- Publication date Nov 2, 2017
- SEMES CO., LTD.
- Jeong Yeong PARK
- B08 - CLEANING

Heehwan KIM

Person

Patents Grantslast 30 patents

Apparatus and method for treating substrate, and nozzle unit

Sensors for detecting substitution between chemicals and methods of...

Standby port and substrate processing apparatus having the same

Substrate treating apparatus and substrate treating method

Substrate treating apparatus and substrate treating method

Unit for supplying fluid, apparatus and method for treating substra...

Patents Applicationslast 30 patents

CHEMICAL SUPPLY APPARATUS, METHOD FOR REMOVING PARTICLES FROM CHEMI...

APPARATUS AND METHOD FOR TREATING SUBSTRATE, AND NOZZLE UNIT

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

APPARATUS AND METHOD FOR TREATING A SUBSTRATE

SENSORS FOR DETECTING SUBSTITUTION BETWEEN CHEMICALS AND METHODS OF...

STANDBY PORT AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

APPARATUS AND METHOD FOR TREATING SUBSTRATE

UNIT FOR SUPPLYING FLUID, APPARATUS AND METHOD FOR TREATING SUBSTRA...

APPARATUS AND METHOD FOR TREATING A SUBSTRATE