Heewon MIN

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Daejeon, KR

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Patents Grantslast 30 patents

Information Patent Grant
Lift apparatus and substrate processing apparatus including the same
- Patent number 11,984,344
- Issue date May 14, 2024
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate processing apparatus including th...
- Patent number 11,404,252
- Issue date Aug 2, 2022
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...
- Publication number 20240162014
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Heewon Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING DEVICE, A SUBSTRATE PROCESSING APPARATUS INCLU...
- Publication number 20240162017
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Heewon MIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20240100639
- Publication date Mar 28, 2024
- Samsung Electronics Co., Ltd.
- INSEOK SEO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIFT APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20210159112
- Publication date May 27, 2021
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
- Publication number 20210111007
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Byeongsang KIM
- H01 - BASIC ELECTRIC ELEMENTS