Heeyeop Chae

Follow

Person

Suwon, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Endpoint detection device for realizing real-time control of plasma...
- Patent number 8,223,329
- Issue date Jul 17, 2012
- DMS Co. Ltd
- Kun Joo Park
- G01 - MEASURING TESTING
Information Patent Grant
Endpoint detection device for realizing real-time control of plasma...
- Patent number 8,049,872
- Issue date Nov 1, 2011
- DMS Co., Ltd.
- Kun Joo Park
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ENDPOINT DETECTION DEVICE FOR REALIZING REAL-TIME CONTROL OF PLASMA...
- Publication number 20120041584
- Publication date Feb 16, 2012
- DMS. CO. LTD.
- Kun Joo PARK
- G01 - MEASURING TESTING
Information Patent Application
Endpoint Detection Device For Realizing Real-Time Control Of Plasma...
- Publication number 20090029489
- Publication date Jan 29, 2009
- DMS. CO. LTD.
- Kun Joo Park
- G01 - MEASURING TESTING