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Heike Drummer
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Process for producing and removing a mask layer
Patent number
7,129,173
Issue date
Oct 31, 2006
Infineon Technologies AG
Heike Drummer
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for monitoring a CMP polishing method and arrangement for a...
Publication number
20060141907
Publication date
Jun 29, 2006
Infineon Technologies AG
Catharina Rudolph
B24 - GRINDING POLISHING
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Patent Application
Process for producing and removing a mask layer
Publication number
20040048479
Publication date
Mar 11, 2004
Heike Drummer
H01 - BASIC ELECTRIC ELEMENTS