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Heiko D. Moritz
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Nashua, NH, US
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Patents Grants
last 30 patents
Information
Patent Grant
Supercritical fluid delivery and recovery system for semiconductor...
Patent number
6,612,317
Issue date
Sep 2, 2003
S.C. Fluids, Inc.
Michael A. Costantini
B08 - CLEANING
Information
Patent Grant
Supercritical fluid cleaning process for precision surfaces
Patent number
6,602,349
Issue date
Aug 5, 2003
S.C. Fluids, Inc.
Mohan Chandra
B08 - CLEANING
Information
Patent Grant
Inverted pressure vessel with shielded closure mechanism
Patent number
6,497,239
Issue date
Dec 24, 2002
S. C. Fluids, Inc.
Robert B Farmer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Supercritical fluid drying system and method of use
Patent number
6,334,266
Issue date
Jan 1, 2002
S.C. Fluids, Inc.
Heiko D Moritz
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
SUPERCRITICAL FLUID DELIVERY SYSTEM FOR SEMICONDUCTOR WAFER PROCESSING
Publication number
20070012341
Publication date
Jan 18, 2007
Stephen B. Douglas
B08 - CLEANING
Information
Patent Application
Supercritical fluid delivery system for semiconductor wafer processing
Publication number
20040025908
Publication date
Feb 12, 2004
Stephen Douglas
B08 - CLEANING
Information
Patent Application
Pressure vessel with internal self sealing door
Publication number
20020017521
Publication date
Feb 14, 2002
Robert B. Farmer
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
Supercritical fluid cleaning process for precision surfaces
Publication number
20020014257
Publication date
Feb 7, 2002
Mohan Chandra
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Supercritical fluid delivery and recovery system for semiconductor...
Publication number
20010050096
Publication date
Dec 13, 2001
Michael A. Costantini
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Inverted pressure vessel with shielded closure mechanism
Publication number
20010029971
Publication date
Oct 18, 2001
Robert B. Farmer
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL