Heiko Wagner

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method including an adjustment of a plurality of wafer handling ele...
- Patent number 10,007,198
- Issue date Jun 26, 2018
- GLOBALFOUNDRIES Inc.
- Heiko Wagner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of providing context specific recipes in a semiconductor fac...
- Patent number 7,962,459
- Issue date Jun 14, 2011
- GLOBALFOUNDRIES Inc.
- Kay Hellig
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of operating an advanced process controller by dynamically a...
- Patent number 7,346,407
- Issue date Mar 18, 2008
- Advanced Micro Devices, Inc.
- Heiko Wagner
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and system for increasing product yield by controlling litho...
- Patent number 7,325,224
- Issue date Jan 29, 2008
- Advanced Micro Devices, Inc.
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for improving exposure uniformity in a step and r...
- Patent number 7,006,195
- Issue date Feb 28, 2006
- Advanced Micro Devices, Inc.
- Jan Raebiger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD INCLUDING AN ADJUSTMENT OF A PLURALITY OF WAFER HANDLING ELE...
- Publication number 20170084475
- Publication date Mar 23, 2017
- GLOBALFOUNDRIES INC.
- Heiko Wagner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of operating an advanced process controller by dynamically a...
- Publication number 20060195213
- Publication date Aug 31, 2006
- Heiko Wagner
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and system for increasing product yield by controlling litho...
- Publication number 20050120328
- Publication date Jun 2, 2005
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of providing context specific recipes in a semiconductor fac...
- Publication number 20040220968
- Publication date Nov 4, 2004
- Kay Hellig
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and system for improving exposure uniformity in a step and r...
- Publication number 20040165164
- Publication date Aug 26, 2004
- Jan Raebiger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY