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Heinrich Hennhofer
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Altotting, DE
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Patents Grants
last 30 patents
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Patent Grant
Process for the surface polishing of silicon wafers
Patent number
6,530,826
Issue date
Mar 11, 2003
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
Guido Wenski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process and device for polishing semiconductor wafers
Patent number
6,095,898
Issue date
Aug 1, 2000
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
Heinrich Hennhofer
B24 - GRINDING POLISHING
Information
Patent Grant
Method and device for polishing semiconductor wafers
Patent number
5,980,361
Issue date
Nov 9, 1999
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
Paul Muller
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
PROCESS FOR TREATING A POLISHED SEMICONDUCTOR WATER IMMEDIATELY AFT...
Publication number
20020187639
Publication date
Dec 12, 2002
HEINRICH HENNHOFER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for the surface polishing of silicon wafers
Publication number
20020077039
Publication date
Jun 20, 2002
WACKER, SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG
Guido Wenski
H01 - BASIC ELECTRIC ELEMENTS