Heinz Felzer

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Landquart, CH

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Patents Grantslast 30 patents

Information Patent Grant
Liquid sputter target
- Patent number 11,952,654
- Issue date Apr 9, 2024
- EVATEC AG
- Dominik Jaeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of processing a substrate...
- Patent number 11,551,950
- Issue date Jan 10, 2023
- EVATEC AG
- Hartmut Rohrmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing an aluminium nitride layer
- Patent number 9,607,831
- Issue date Mar 28, 2017
- EVATEC AG
- Lorenzo Castaldi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for depositing a group III nitride semiconductor film
- Patent number 9,478,420
- Issue date Oct 25, 2016
- EVATEC AG
- Lorenzo Castaldi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF sputtering arrangement
- Patent number 8,268,142
- Issue date Sep 18, 2012
- OC Oerlikon Balzers AG
- Jürgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID SPUTTER TARGET
- Publication number 20210381099
- Publication date Dec 9, 2021
- Evatec AG
- Dominik Jaeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...
- Publication number 20200388517
- Publication date Dec 10, 2020
- Evatec AG
- Hartmut Rohrmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING SOURCE
- Publication number 20190252166
- Publication date Aug 15, 2019
- Evatec AG
- Heinz Felzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN ALUMINIUM NITRIDE LAYER
- Publication number 20150179430
- Publication date Jun 25, 2015
- Oerlikon Advanced Technologies AG
- Lorenzo Castaldi
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR DEPOSITING A GROUP III NITRIDE SEMICONDUCTOR FILM
- Publication number 20150140792
- Publication date May 21, 2015
- Oerlikon Advanced Technologies AG
- Lorenzo Castaldi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SPUTTERING ARRANGEMENT
- Publication number 20100155238
- Publication date Jun 24, 2010
- OC OERLIKON BALZERS AG
- Jürgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS