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Heinz Fissan
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Kerken-Aledekerk, DE
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last 30 patents
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Patent Grant
Real-time monitoring of particles in semiconductor vacuum environment
Patent number
7,655,945
Issue date
Feb 2, 2010
Regents of the University of Minnesota
David Y. Pui
G01 - MEASURING TESTING
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Patent Application
REAL-TIME MONITORING OF PARTICLES IN SEMICONDUCTOR VACUUM ENVIRONMENT
Publication number
20090206820
Publication date
Aug 20, 2009
David Y. Pui
G01 - MEASURING TESTING