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Heinz Mann
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Facet mirror having a number of mirror facets
Patent number
7,354,168
Issue date
Apr 8, 2008
Carl Zeiss SMT AG
Hubert Holderer
G02 - OPTICS
Information
Patent Grant
Facet mirror having a number of mirror facets
Patent number
7,090,362
Issue date
Aug 15, 2006
Carl Zeiss SMT AG
Hubert Holderer
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Facet mirrors and a method for producing mirror facets
Publication number
20070019310
Publication date
Jan 25, 2007
Carl Zeiss SMT AG
Andreas Seifert
G02 - OPTICS
Information
Patent Application
Facet mirror having a number of mirror facets
Publication number
20050030653
Publication date
Feb 10, 2005
Hubert Holderer
G02 - OPTICS
Information
Patent Application
Facet mirror having a number of mirror facets
Publication number
20050030656
Publication date
Feb 10, 2005
Hubert Holderer
G02 - OPTICS