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Heinz Siegert
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Williston, VT, US
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last 30 patents
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Patent Grant
Method of improving x-ray lithography in the sub 100nm range to cre...
Patent number
6,845,145
Issue date
Jan 18, 2005
SAL, Inc.
Robert Allen Selzer
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Grant
Method of improving x-ray lithography in the sub 100nm range to cre...
Patent number
6,295,332
Issue date
Sep 25, 2001
Robert Allen Selzer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Method of improving x-ray lithography in the sub 100nm range to cre...
Publication number
20010026606
Publication date
Oct 4, 2001
Franz Ludwig Rauch
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING