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Helmut Banzhof
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Pfullingen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-beam scanning electron beam device and methods of using the same
Patent number
9,153,413
Issue date
Oct 6, 2015
Applied Materials Israel, Ltd.
Gilad Almogy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High resolution gas field ion column with reduced sample load
Patent number
8,735,847
Issue date
May 27, 2014
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Helmut Banzhof
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and a method of operating a charged pa...
Patent number
8,294,096
Issue date
Oct 23, 2012
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Helmut Banzhof
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrangement and method for the contrast improvement in a charged pa...
Patent number
8,164,067
Issue date
Apr 24, 2012
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Pavel Adamec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Achromatic mass separator
Patent number
8,049,180
Issue date
Nov 1, 2011
ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and method for operating a charged...
Patent number
7,838,830
Issue date
Nov 23, 2010
ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-function module for an electron beam column
Patent number
7,800,075
Issue date
Sep 21, 2010
Benyamin Buller
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam device with aperture
Patent number
7,763,866
Issue date
Jul 27, 2010
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Jürgen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam column for writing shaped electron beams
Patent number
7,427,765
Issue date
Sep 23, 2008
Jeol, Ltd.
Benyamin Buller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electron beam device
Patent number
7,282,711
Issue date
Oct 16, 2007
ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Dieter Winkler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND A METHOD OF OPERATING A CHARGED PA...
Publication number
20110253893
Publication date
Oct 20, 2011
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Helmut BANZHOF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT SEM TOOL
Publication number
20110163229
Publication date
Jul 7, 2011
APPLIED MATERIALS ISRAEL, LTD.
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT SEM TOOL
Publication number
20100320382
Publication date
Dec 23, 2010
APPLIED MATERIALS ISRAEL, LTD.
Gilad Almogy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARRANGEMENT AND METHOD FOR THE CONTRAST IMPROVEMENT IN A CHARGED PA...
Publication number
20100200748
Publication date
Aug 12, 2010
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Pavel ADAMEC
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH RESOLUTION GAS FIELD ION COLUMN WITH REDUCED SAMPLE LOAD
Publication number
20090146074
Publication date
Jun 11, 2009
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Helmut BANZHOF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-FUNCTION MODULE FOR AN ELECTRON BEAM COLUMN
Publication number
20080308751
Publication date
Dec 18, 2008
JEOL, Inc.
Benyamin Buller
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A CHARGED...
Publication number
20080258060
Publication date
Oct 23, 2008
JUERGEN FROSIEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACHROMATIC MASS SEPARATOR
Publication number
20080185514
Publication date
Aug 7, 2008
JUERGEN FROSIEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM APPARATUS AND METHOD FOR ALIGNING SAME
Publication number
20080073583
Publication date
Mar 27, 2008
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Thomas JASINSKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device with Aperture
Publication number
20070257207
Publication date
Nov 8, 2007
Jurgen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam column for writing shaped electron beams
Publication number
20070085033
Publication date
Apr 19, 2007
APPLIED MATERIALS, INC.
Benyamin Buller
B82 - NANO-TECHNOLOGY
Information
Patent Application
Multiple electron beam device
Publication number
20040256556
Publication date
Dec 23, 2004
Dieter Winkler
B82 - NANO-TECHNOLOGY