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Schoenau an der Triesting, AT
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last 30 patents
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Patent Grant
Particle-optical system
Patent number
8,368,015
Issue date
Feb 5, 2013
Carl Zeiss SMS GmbH
Elmar Platzgummer
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
Particle-Optical System
Publication number
20100270474
Publication date
Oct 28, 2010
CARL ZEISS SMS GMBH
Elmar Platzgummer
B82 - NANO-TECHNOLOGY