Helmut Krause

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for measuring lithography masks
- Patent number 8,253,947
- Issue date Aug 28, 2012
- Carl Zeiss SMS GmbH
- Albrecht Hof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDER
- Publication number 20130083308
- Publication date Apr 4, 2013
- Carl Zeiss SMT GMBH
- Ulrich Mueller
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
- Publication number 20110205549
- Publication date Aug 25, 2011
- Carl Zeiss SMS GmbH
- Albrecht Hof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK
- Publication number 20100153059
- Publication date Jun 17, 2010
- Gerd Klose
- G01 - MEASURING TESTING