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Helmut Merkle
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Tomerdingen, DE
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last 30 patents
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Patent Grant
Rapid thermal processing (RTP) system with rotating substrate
Patent number
5,965,047
Issue date
Oct 12, 1999
Steag AST
Werner Blersch
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Inflatable elastomeric element for rapid thermal processing (RTP) s...
Patent number
5,870,526
Issue date
Feb 9, 1999
Steag-Ast
Helmut Aschner
C30 - CRYSTAL GROWTH