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HELMUT SKAPA
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REUTLINGEN, DE
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Patents Grants
last 30 patents
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Patent Grant
Nonstick layer for a micromechanical component
Patent number
6,656,368
Issue date
Dec 2, 2003
Robert Bosch GmbH
Martin Schoefthaler
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method for fabricating a micromechanical component
Patent number
6,268,232
Issue date
Jul 31, 2001
Robert Bosch GmbH
Helmut Skapa
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method of producing acceleration sensors
Patent number
5,937,275
Issue date
Aug 10, 1999
Robert Bosch GmbH
Horst Munzel
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
NONSTICK LAYER FOR A MICROMECHANICAL COMPONENT
Publication number
20030139040
Publication date
Jul 24, 2003
MARTIN SCHOEFTHALER
B81 - MICRO-STRUCTURAL TECHNOLOGY