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Hendrik Jan Hidde SMILDE
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology method and apparatus, lithographic system, device manufac...
Patent number
11,466,980
Issue date
Oct 11, 2022
ASML Netherlands B.V.
Maurits Van Der Schaar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology method and apparatus, lithographic system, device manufac...
Patent number
9,714,827
Issue date
Jul 25, 2017
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
8,223,347
Issue date
Jul 17, 2012
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Metrology Method and Apparatus, Lithographic System, Device Manufac...
Publication number
20170314915
Publication date
Nov 2, 2017
ASML NETHERLANDS B.V.
Maurits Van Der Schaar
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method and Apparatus, Lithographic System, Device Manufac...
Publication number
20150145151
Publication date
May 28, 2015
ASML NETHERLANDS B.V.
Maurits Van Der Schaar
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method and Apparatus, and Device Manufacturing Method
Publication number
20120242970
Publication date
Sep 27, 2012
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method and Inspection Apparatus, Lithographic System and...
Publication number
20120123581
Publication date
May 17, 2012
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Substrate for Use in Metrology, Metrology Method and Device Manufac...
Publication number
20120044470
Publication date
Feb 23, 2012
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection Apparatus and Method, Lithographic Apparatus and Lithogr...
Publication number
20120033193
Publication date
Feb 9, 2012
ASML NETHERLANDS B.V.
Maurits VAN DER SCHAAR
G01 - MEASURING TESTING
Information
Patent Application
Substrate, a Method of Measuring a Property, an Inspection Apparat...
Publication number
20110205518
Publication date
Aug 25, 2011
ASML NETHERLANDS B.V.
Marcus Adrianus Van De Kerkhof
G02 - OPTICS
Information
Patent Application
Substrate, an Inspection Apparatus, and a Lithographic Apparatus
Publication number
20110194092
Publication date
Aug 11, 2011
ASML NETHERLANDS B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method and Apparatus, Lithographic Apparatus, Device Manu...
Publication number
20110043791
Publication date
Feb 24, 2011
ASML NETHERLANDS B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and Scatterometers, Lithographic Systems, and Lithographic...
Publication number
20110027704
Publication date
Feb 3, 2011
ASML NETHERLANDS B.V.
Hugo Augustinus Joseph Cramer
G01 - MEASURING TESTING
Information
Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
Publication number
20110001978
Publication date
Jan 6, 2011
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY