Hendrik Steigerwald

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Urmitz, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for repairing defects of a photolithographic m...
- Patent number 11,774,848
- Issue date Oct 3, 2023
- Carl Zeiss SMT GmbH
- Hendrik Steigerwald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for repairing defects of a photolithographic m...
- Patent number 11,079,673
- Issue date Aug 3, 2021
- Carl Zeiss SMT GmbH
- Hendrik Steigerwald
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC M...
- Publication number 20210325775
- Publication date Oct 21, 2021
- Carl Zeiss SMT GMBH
- Hendrik Steigerwald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC M...
- Publication number 20180284600
- Publication date Oct 4, 2018
- Carl Ziess SMT GmbH
- Hendrik Steigerwald
- G06 - COMPUTING CALCULATING COUNTING