Membership
Tour
Register
Log in
Hendrikus Gijsbertus Schimmel
Follow
Person
Utrect, NL
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Particle traps and barriers for particle suppression
Patent number
11,175,596
Issue date
Nov 16, 2021
ASML Netherlands B.V.
Han-Kwang Nienhuys
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
10,394,141
Issue date
Aug 27, 2019
ASML Netherlands B.V.
Michel Riepen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation system and optical device
Patent number
10,359,710
Issue date
Jul 23, 2019
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Radiation source, lithographic apparatus device manufacturing metho...
Patent number
10,222,701
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Chuangxin Zhao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source and method for lithography
Patent number
10,095,119
Issue date
Oct 9, 2018
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
9,753,383
Issue date
Sep 5, 2017
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fuel stream generator, source collector apparatus and lithographic...
Patent number
9,671,698
Issue date
Jun 6, 2017
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Source-collector device, lithographic apparatus, and device manufac...
Patent number
9,411,238
Issue date
Aug 9, 2016
ASML Netherlands B.V.
Andrei Mikhailovich Yakunin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Module and method for producing extreme ultraviolet radiation
Patent number
9,363,879
Issue date
Jun 7, 2016
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
9,310,689
Issue date
Apr 12, 2016
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source
Patent number
9,113,539
Issue date
Aug 18, 2015
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Module and method for producing extreme ultraviolet radiation
Patent number
8,901,521
Issue date
Dec 2, 2014
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,749,756
Issue date
Jun 10, 2014
ASML Netherlands B.V.
Yuri Johannes Gabrial Van De Vijver
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and system for determining a suppression factor of a suppres...
Patent number
8,711,325
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
Patent number
8,319,200
Issue date
Nov 27, 2012
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation sources and methods of generating radiation
Patent number
8,278,636
Issue date
Oct 2, 2012
ASML Netherlands B.V.
Erik Roelof Loopstra
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
Patent number
8,232,537
Issue date
Jul 31, 2012
ASML Netherlands, B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,115,900
Issue date
Feb 14, 2012
ASML Netherlands B.V.
Yuri Johannes Gabriël Van De Vijver
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Radiation system and lithographic apparatus
Patent number
7,397,538
Issue date
Jul 8, 2008
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Particle Traps and Barriers for Particle Suppression
Publication number
20200225591
Publication date
Jul 16, 2020
ASML Netherlands B,V.
Han-Kwang NIENHUYS
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
A Radiation System and Optical Device
Publication number
20180307146
Publication date
Oct 25, 2018
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus SCHIMMEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation Source and Lithographic Apparatus
Publication number
20170322499
Publication date
Nov 9, 2017
ASML NETHERLANDS B.V.
Michel RIEPEN
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Application
Radiation Source and Method for Lithography
Publication number
20160274467
Publication date
Sep 22, 2016
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus SCHIMMEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHO...
Publication number
20160209753
Publication date
Jul 21, 2016
ASML NETHERLANDS B.V.
Chuangxin ZHAO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation Source and Lithographic Apparatus
Publication number
20150338753
Publication date
Nov 26, 2015
ASML NETHERLANDS B.V.
Michel RIEPEN
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Application
MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
Publication number
20150077729
Publication date
Mar 19, 2015
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf VAN EMPEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Fuel Stream Generator, Source Collector Apparatus and Lithographic...
Publication number
20150029478
Publication date
Jan 29, 2015
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
Publication number
20150002830
Publication date
Jan 1, 2015
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SOURCE-COLLECTOR DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFAC...
Publication number
20140375974
Publication date
Dec 25, 2014
Andrei Mikhailovich Yakunin
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Radiation Source
Publication number
20130077070
Publication date
Mar 28, 2013
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus SCHIMMEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120147348
Publication date
Jun 14, 2012
ASML NETHERLANDS B.V.
Yuri Johannes Gabriel VAN DE VIJVER
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRES...
Publication number
20110261329
Publication date
Oct 27, 2011
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SYSTEM AND METHOD, AND A SPECTRAL PURITY FILTER
Publication number
20110024651
Publication date
Feb 3, 2011
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
Publication number
20100157267
Publication date
Jun 24, 2010
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus SCHIMMEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
RADIATION SOURCES AND METHODS OF GENERATING RADIATION
Publication number
20100039631
Publication date
Feb 18, 2010
ASML NETHERLANDS B.V.
Erik Roelof LOOPSTRA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
Publication number
20100038562
Publication date
Feb 18, 2010
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus SCHIMMEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
Publication number
20090090877
Publication date
Apr 9, 2009
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090073396
Publication date
Mar 19, 2009
ASML NETHERLANDS B.V.
Yuri Johannes Gabriel Van De Vijver
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation system and lithographic apparatus
Publication number
20070115445
Publication date
May 24, 2007
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY