Hendrikus Robertus Marie Van Greevenbroek

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,279,405
- Issue date Oct 2, 2012
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminator for a lithographic apparatus and method
- Patent number 7,952,685
- Issue date May 31, 2011
- Carl Zeiss SMT AG
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,872,731
- Issue date Jan 18, 2011
- ASML Netherlands B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,697,116
- Issue date Apr 13, 2010
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for uniformity correction
- Patent number 7,525,641
- Issue date Apr 28, 2009
- ASML Holding N.V.
- Richard C. Zimmerman
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus
- Patent number 7,375,799
- Issue date May 20, 2008
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,170,587
- Issue date Jan 30, 2007
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Kit of parts for assembling an optical element, method of assemblin...
- Patent number 7,038,763
- Issue date May 2, 2006
- ASML Netherlands B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR REDUCING STRAY RADIATION
- Publication number 20120075610
- Publication date Mar 29, 2012
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method for Illumination Uniformity Corre...
- Publication number 20100302525
- Publication date Dec 2, 2010
- ASML Holding N.V.
- Richard Carl ZIMMERMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Passive reticle tool, a lithographic apparatus and a method of patt...
- Publication number 20100182582
- Publication date Jul 22, 2010
- ASML NETHERLANDS B.V,
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100141918
- Publication date Jun 10, 2010
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection system and projection lens polarization sensor
- Publication number 20100118288
- Publication date May 13, 2010
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Lithographic Apparatus, Method for Determining at Least One Polariz...
- Publication number 20100045956
- Publication date Feb 25, 2010
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and method
- Publication number 20090135394
- Publication date May 28, 2009
- ASML NETHERLANDS B.V.
- Hendrikus Robertus Marie Van Greevenbroek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080259300
- Publication date Oct 23, 2008
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20080239268
- Publication date Oct 2, 2008
- ASML NETHERLANDS B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of operating a lithographic apparatus, lithographic apparatu...
- Publication number 20020027648
- Publication date Mar 7, 2002
- Hans Van Der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hendrikus Robertus Marie Van Greevenbroek

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method

Illuminator for a lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

System and method for uniformity correction

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Kit of parts for assembling an optical element, method of assemblin...

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND METHOD FOR REDUCING STRAY RADIATION

Lithographic Apparatus and Method for Illumination Uniformity Corre...

Passive reticle tool, a lithographic apparatus and a method of patt...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic projection system and projection lens polarization sensor

Lithographic Apparatus, Method for Determining at Least One Polariz...

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Method of operating a lithographic apparatus, lithographic apparatu...