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Heng PAN
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for conformal treatment of dielectric films with low therma...
Patent number
10,886,122
Issue date
Jan 5, 2021
Applied Materials, Inc.
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for selective oxidation at lower temperature u...
Patent number
10,714,333
Issue date
Jul 14, 2020
Applied Materials, Inc.
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support ring for more uniform layer thickness
Patent number
10,211,046
Issue date
Feb 19, 2019
Applied Materials, Inc.
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method to measure temperature of 3D semiconductor str...
Patent number
9,909,925
Issue date
Mar 6, 2018
Applied Materials, Inc.
Heng Pan
G01 - MEASURING TESTING
Information
Patent Grant
Minimal contact edge ring for rapid thermal processing
Patent number
9,768,052
Issue date
Sep 19, 2017
Applied Materials, Inc.
Heng Pan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for conformal treatment of dielectric films with low therma...
Patent number
9,728,401
Issue date
Aug 8, 2017
Applied Materials, Inc.
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Minimal contact edge ring for rapid thermal processing
Patent number
9,558,982
Issue date
Jan 31, 2017
Applied Materials, Inc.
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for conformal treatment of dielectric films using inductivel...
Patent number
9,012,336
Issue date
Apr 21, 2015
Applied Materials, Inc.
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD TO MEASURE TEMPERATURE OF 3D SEMICONDUCTOR STR...
Publication number
20180283957
Publication date
Oct 4, 2018
Applied Materials, Inc.
Heng PAN
G01 - MEASURING TESTING
Information
Patent Application
METHODS FOR CONFORMAL TREATMENT OF DIELECTRIC FILMS WITH LOW THERMA...
Publication number
20170316930
Publication date
Nov 2, 2017
Applied Materials, Inc.
HENG PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR SELECTIVE OXIDATION AT LOWER TEMPERATURE U...
Publication number
20160300712
Publication date
Oct 13, 2016
Applied Materials, Inc.
Heng PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT RING FOR MORE UNIFORM LAYER THICKNESS
Publication number
20150020736
Publication date
Jan 22, 2015
Applied Materials, Inc.
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Conformal Treatment of Dielectric Films Us...
Publication number
20140302686
Publication date
Oct 9, 2014
Heng Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Post-Deposition Treatment Methods For Silicon Nitride
Publication number
20140273530
Publication date
Sep 18, 2014
Victor Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MINIMAL CONTACT EDGE RING FOR RAPID THERMAL PROCESSING
Publication number
20140265101
Publication date
Sep 18, 2014
Applied Materials, Inc.
Heng PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR CONFORMAL TREATMENT OF DIELECTRIC FILMS WITH LOW THERMA...
Publication number
20140273539
Publication date
Sep 18, 2014
Applied Materials, Inc.
HENG PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MINIMAL CONTACT EDGE RING FOR RAPID THERMAL PROCESSING
Publication number
20140113458
Publication date
Apr 24, 2014
Applied Materials, Inc.
Heng PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR SELECTIVE OXIDATION AT LOWER TEMPERATURE U...
Publication number
20140034632
Publication date
Feb 6, 2014
Heng PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD TO MEASURE TEMPERATURE OF 3D SEMICONDUCTOR STR...
Publication number
20130120737
Publication date
May 16, 2013
Heng Pan
G01 - MEASURING TESTING