Heng-Yi Tseng

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Gas-supply system and method
- Patent number 9,632,516
- Issue date Apr 25, 2017
- TAWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Yung-Long Chen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and method for positioning gas injectors in a vertical fu...
- Patent number 6,435,865
- Issue date Aug 20, 2002
- Taiwan Semiconductor Manufacturing Co., Ltd
- Heng-Yi Tseng
- C30 - CRYSTAL GROWTH
Information Patent Grant
Wafer boat having improved wafer holding capability
- Patent number 6,341,935
- Issue date Jan 29, 2002
- Taiwan Semiconductor Manufacturing Company, Ltd
- Heng-Yi Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for evacuating a process chamber
- Patent number 6,174,376
- Issue date Jan 16, 2001
- Taiwan Semiconductor Manufacturing Co., Ltd
- Heng-Yi Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
VALVE BOX MODULE, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM AND MET...
- Publication number 20220336235
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- FANG-PIN CHIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS-SUPPLY SYSTEM AND METHOD
- Publication number 20150177745
- Publication date Jun 25, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Yung-Long CHEN
- H01 - BASIC ELECTRIC ELEMENTS