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Henk F. D. Linders
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Dommelen, NL
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last 30 patents
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Patent Grant
Apparatus for projecting a mask pattern on a substrate
Patent number
5,481,362
Issue date
Jan 2, 1996
ASM Lithography
Marinus A. Van Den Brink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Imaging apparatus having a focus-error and/or tilt detection device
Patent number
5,191,200
Issue date
Mar 2, 1993
U.S. Philips Corp.
Jan E. van der Werf
G02 - OPTICS