Henner W. Meinhold

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature controlled showerhead
- Patent number 10,584,415
- Issue date Mar 10, 2020
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled showerhead
- Patent number 10,221,484
- Issue date Mar 5, 2019
- Novellus Systems, Inc.
- Henner W. Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled showerhead
- Patent number 9,476,120
- Issue date Oct 25, 2016
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled showerhead
- Patent number 8,673,080
- Issue date Mar 18, 2014
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled showerhead
- Patent number 8,137,467
- Issue date Mar 20, 2012
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Edge removal of films using externally generated plasma species
- Patent number 8,100,081
- Issue date Jan 24, 2012
- Novellus Systems, Inc.
- Jon Henri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer removal process with higher etch amount
- Patent number 8,058,179
- Issue date Nov 15, 2011
- Novellus Systems, Inc.
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive planarization assembly for electrochemical mechanical pl...
- Patent number 7,695,597
- Issue date Apr 13, 2010
- Novellus Systems, Inc.
- John Drewery
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for planar electroplating
- Patent number 7,449,098
- Issue date Nov 11, 2008
- Novellus Systems, Inc.
- Steven T. Mayer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Conductive contacts and methods for fabricating conductive contacts...
- Patent number 7,391,086
- Issue date Jun 24, 2008
- Novellus Systems, Inc.
- John Drewery
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Deposition of integrated circuit fabrication materials using a prin...
- Patent number 7,091,134
- Issue date Aug 15, 2006
- Novellus Systems, Inc.
- Henner W. Meinhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin bowl having fluid seal for preventing air from flowing into th...
- Patent number 6,767,403
- Issue date Jul 27, 2004
- Novellus Systems, Inc.
- Fred J. Chetcuti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor for detecting droplet characteristics
- Patent number 6,764,168
- Issue date Jul 20, 2004
- Novellus Systems, Inc.
- Henner W. Meinhold
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
System and method for coating substrates using ink jet technology
- Patent number 6,436,843
- Issue date Aug 20, 2002
- Novellus Systems, Inc.
- Henner Meinhold
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20190256977
- Publication date Aug 22, 2019
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20170009344
- Publication date Jan 12, 2017
- Novellus Systems, Inc.
- Henner W. Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER REMOVAL PROCESS WITH HIGHER ETCH AMOUNT
- Publication number 20150118848
- Publication date Apr 30, 2015
- Novellus System, Inc.
- Nerissa Draeger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20140158792
- Publication date Jun 12, 2014
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature controlled showerhead
- Publication number 20090095218
- Publication date Apr 16, 2009
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature controlled showerhead
- Publication number 20090095219
- Publication date Apr 16, 2009
- Novellus Systems, Inc.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED SHOWERHEAD
- Publication number 20090095220
- Publication date Apr 16, 2009
- NOVELLUS SYSTEMS INC.
- Henner Meinhold
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Henner W. Meinhold

Person

Patents Grantslast 30 patents

Temperature controlled showerhead

Temperature controlled showerhead

Temperature controlled showerhead

Temperature controlled showerhead

Temperature controlled showerhead

Edge removal of films using externally generated plasma species

Atomic layer removal process with higher etch amount

Conductive planarization assembly for electrochemical mechanical pl...

Method for planar electroplating

Conductive contacts and methods for fabricating conductive contacts...

Deposition of integrated circuit fabrication materials using a prin...

Spin bowl having fluid seal for preventing air from flowing into th...

Sensor for detecting droplet characteristics

System and method for coating substrates using ink jet technology

Patents Applicationslast 30 patents

TEMPERATURE CONTROLLED SHOWERHEAD

TEMPERATURE CONTROLLED SHOWERHEAD

ATOMIC LAYER REMOVAL PROCESS WITH HIGHER ETCH AMOUNT

TEMPERATURE CONTROLLED SHOWERHEAD

Temperature controlled showerhead

Temperature controlled showerhead

TEMPERATURE CONTROLLED SHOWERHEAD