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Henricus Johannes Lambertus Megens
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method of selecting a grid model for correcting a process recipe fo...
Patent number
7,468,795
Issue date
Dec 23, 2008
ASML Netherlands B.V.
Hubertus Johannes Gertrudus Simons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD OF CONTROLLING A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURIN...
Publication number
20120229786
Publication date
Sep 13, 2012
ASML NETHERLANDS B.V.
Adrianus Franciscus Petrus ENGELEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment System, Lithographic System and Method
Publication number
20110196646
Publication date
Aug 11, 2011
ASML NETHERLANDS B.V.
Everhardus Mos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Overlay Measurement
Publication number
20110141450
Publication date
Jun 16, 2011
ASML NETHERLANDS B.V.
Henricus Johannes Lambertus Megens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method, Inspection Apparatus and Substrate for Determining an Appro...
Publication number
20110085176
Publication date
Apr 14, 2011
ASML NETHERLANDS B.V.
Hugo Augustinus Joseph Cramer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and Scatterometers, Lithographic Systems, and Lithographic...
Publication number
20110027704
Publication date
Feb 3, 2011
ASML NETHERLANDS B.V.
Hugo Augustinus Joseph Cramer
G01 - MEASURING TESTING
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Patent Application
Method of Determining a Characteristic
Publication number
20100165312
Publication date
Jul 1, 2010
ASML NETHERLANDS B.V.
Henricus Johannes Lambertus Megens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method, mask and device
Publication number
20070048626
Publication date
Mar 1, 2007
ASML NETHERLANDS B.V.
Henricus Johannes Lambertus Megens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY