Henricus Johannes Lambertus Megens

Person

Waalre, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement apparatus and a method for determining a substrate grid
- Patent number 11,966,166
- Issue date Apr 23, 2024
- ASML Netherlands B.V.
- Franciscus Godefridus Casper Bijnen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement apparatus and a method for determining a substrate grid
- Patent number 11,079,684
- Issue date Aug 3, 2021
- ASML Netherlands B.V.
- Franciscus Godefridus Casper Bijnen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithographic method
- Patent number 11,029,610
- Issue date Jun 8, 2021
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Source separation from metrology data
- Patent number 11,016,397
- Issue date May 25, 2021
- ASML Netherlands B.V.
- Scott Anderson Middlebrooks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 10,962,887
- Issue date Mar 30, 2021
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 10,527,958
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining critical-dimension-related properties, inspec...
- Patent number 10,180,628
- Issue date Jan 15, 2019
- ASML Netherlands B.V.
- Hugo Augustinus Joseph Cramer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of controlling a lithographic apparatus, device manufacturin...
- Patent number 9,696,635
- Issue date Jul 4, 2017
- ASML Netherlands B.V.
- Adrianus Fransiscus Petrus Engelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining lithographic quality of a stru...
- Patent number 9,518,936
- Issue date Dec 13, 2016
- ASML Netherlands B.V.
- Willem Jan Grootjans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and scatterometers, lithographic systems, and lithographic...
- Patent number 9,081,303
- Issue date Jul 14, 2015
- ASML Netherlands B.V.
- Hugo Augustinus Joseph Cramer
- G01 - MEASURING TESTING
Information Patent Grant
Methods and scatterometers, lithographic systems, and lithographic...
- Patent number 8,994,944
- Issue date Mar 31, 2015
- ASML Netherlands B.V.
- Hugo Augustinus Joseph Cramer
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for overlay measurement
- Patent number 8,982,328
- Issue date Mar 17, 2015
- ASML Netherlands B.V.
- Henricus Johannes Lambertus Megens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system, lithographic system and method
- Patent number 8,706,442
- Issue date Apr 22, 2014
- ASML Netherlands B.V.
- Everhardus Cornelis Mos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining a characteristic
- Patent number 8,502,955
- Issue date Aug 6, 2013
- ASML Netherlands B.V.
- Henricus Johannes Lambertus Megens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, inspection apparatus and substrate for determining an appro...
- Patent number 8,390,823
- Issue date Mar 5, 2013
- ASML Netherlands B.V.
- Hugo Augustinus Joseph Cramer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
- Publication number 20230017491
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS AND A METHOD FOR DETERMINING A SUBSTRATE GRID
- Publication number 20210341846
- Publication date Nov 4, 2021
- ASML NETHERLANDS B.V.
- Franciscus Godefridus Casper BIJNEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20200272061
- Publication date Aug 27, 2020
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SOURCE SEPARATION FROM METROLOGY DATA
- Publication number 20200192229
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Scott Anderson MIDDLEBROOKS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20200081356
- Publication date Mar 12, 2020
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS AND A METHOD FOR DETERMINING A SUBSTRATE GRID
- Publication number 20190235391
- Publication date Aug 1, 2019
- ASML NETHERLANDS B.V.
- Franciscus Godefridus Casper BIJNEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20190094721
- Publication date Mar 28, 2019
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF DETERMINING CRITICAL-DIMENSION-RELATED PROPERTIES, INSPEC...
- Publication number 20160116849
- Publication date Apr 28, 2016
- ASML NETHERLANDS B.V.
- Hugo Augustinus Joseph CRAMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Determining Lithographic Quality of a Stru...
- Publication number 20150308966
- Publication date Oct 29, 2015
- ASML Nertherlands B.V
- Willem Jan GROOTJANS
- G01 - MEASURING TESTING
Information Patent Application
Methods and Scatterometers, Lithographic Systems, and Lithographic...
- Publication number 20140139814
- Publication date May 22, 2014
- ASML NETHERLANDS B.V.
- Hugo Augustinus Joseph CRAMER
- G01 - MEASURING TESTING

Henricus Johannes Lambertus Megens

Person

Patents Grantslast 30 patents

Measurement apparatus and a method for determining a substrate grid

Measurement apparatus and a method for determining a substrate grid

Lithographic method

Source separation from metrology data

Lithographic method

Lithographic method

Method of determining critical-dimension-related properties, inspec...

Method of controlling a lithographic apparatus, device manufacturin...

Method and apparatus for determining lithographic quality of a stru...

Methods and scatterometers, lithographic systems, and lithographic...

Methods and scatterometers, lithographic systems, and lithographic...

Method and apparatus for overlay measurement

Alignment system, lithographic system and method

Method of determining a characteristic

Method, inspection apparatus and substrate for determining an appro...

Patents Applicationslast 30 patents

METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES

MEASUREMENT APPARATUS AND A METHOD FOR DETERMINING A SUBSTRATE GRID

LITHOGRAPHIC METHOD

SOURCE SEPARATION FROM METROLOGY DATA

LITHOGRAPHIC METHOD

MEASUREMENT APPARATUS AND A METHOD FOR DETERMINING A SUBSTRATE GRID

LITHOGRAPHIC METHOD

METHOD OF DETERMINING CRITICAL-DIMENSION-RELATED PROPERTIES, INSPEC...

Method and Apparatus for Determining Lithographic Quality of a Stru...

Methods and Scatterometers, Lithographic Systems, and Lithographic...