Henricus Petrus Maria Pellemans

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 11,828,585
- Issue date Nov 28, 2023
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 11,525,786
- Issue date Dec 13, 2022
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position metrology apparatus and associated optical elements
- Patent number 11,428,925
- Issue date Aug 30, 2022
- ASML Netherlands B.V.
- Arjan Johannes Anton Beukman
- G01 - MEASURING TESTING
Information Patent Grant
Alignment method and associated metrology device
- Patent number 11,372,343
- Issue date Jun 28, 2022
- ASML Netherlands B.V.
- Henricus Martinus Johannes Van De Groes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology sensor for position metrology
- Patent number 11,360,399
- Issue date Jun 14, 2022
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 11,307,024
- Issue date Apr 19, 2022
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 10,955,353
- Issue date Mar 23, 2021
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 10,591,283
- Issue date Mar 17, 2020
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 10,241,055
- Issue date Mar 26, 2019
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 10,209,061
- Issue date Feb 19, 2019
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 9,933,250
- Issue date Apr 3, 2018
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focus monitoring arrangement and inspection apparatus including suc...
- Patent number 9,921,489
- Issue date Mar 20, 2018
- ASML Netherlands B.V.
- Amandev Singh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and methods, methods of manufacturing devices
- Patent number 9,753,379
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Amandev Singh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photon source, metrology apparatus, lithographic system and device...
- Patent number 9,357,626
- Issue date May 31, 2016
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Metrology method and apparatus, and device manufacturing method
- Patent number 9,158,194
- Issue date Oct 13, 2015
- ASML Netherlands B.V.
- Armand Eugene Albert Koolen
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus, lithographic apparatus, lithographic processi...
- Patent number 9,128,065
- Issue date Sep 8, 2015
- ASML Netherlands B.V.
- Hugo Augustinus Joseph Cramer
- G01 - MEASURING TESTING
Information Patent Grant
Photon source, metrology apparatus, lithographic system and device...
- Patent number 8,921,814
- Issue date Dec 30, 2014
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
- Patent number 8,885,150
- Issue date Nov 11, 2014
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of assessing a model of a substrate, an inspection apparatus...
- Patent number 8,830,472
- Issue date Sep 9, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,760,662
- Issue date Jun 24, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus, lithographic apparatus, lithographic processi...
- Patent number 8,705,007
- Issue date Apr 22, 2014
- ASML Netherlands B.V.
- Hugo Augustinus Joseph Cramer
- G01 - MEASURING TESTING
Information Patent Grant
Calibration method and apparatus
- Patent number 8,553,218
- Issue date Oct 8, 2013
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,553,230
- Issue date Oct 8, 2013
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Metrology method and apparatus, lithographic apparatus, device manu...
- Patent number 8,411,287
- Issue date Apr 2, 2013
- ASML Netherlands B.V.
- Hendrik Jan Hidde Smilde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY METHOD AND SYSTEM AND LITHOGRAPHIC SYSTEM
- Publication number 20240094643
- Publication date Mar 21, 2024
- ASML NETHERLANDS B.V.
- Filippo ALPEGGIANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION METHOD AND APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPH...
- Publication number 20240044639
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY SYSTEM AND COHERENCE ADJUSTERS
- Publication number 20240027913
- Publication date Jan 25, 2024
- ASML NETHERLANDS B.V.
- Sergei SOKOLOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND LITHOGRAPHIC APPARATUSES
- Publication number 20220397832
- Publication date Dec 15, 2022
- ASML NETHERLANDS B.V.
- Filippo ALPEGGIANI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20220196393
- Publication date Jun 23, 2022
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT METHOD AND ASSOCIATED METROLOGY DEVICE
- Publication number 20220100107
- Publication date Mar 31, 2022
- ASML NETHERLANDS B.V.
- Henricus Martinus Johannes VAN DE GROES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY SENSOR FOR POSITION METROLOGY
- Publication number 20220035257
- Publication date Feb 3, 2022
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20210208083
- Publication date Jul 8, 2021
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20200217648
- Publication date Jul 9, 2020
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
Position Metrology Apparatus and Associated Optical Elements
- Publication number 20200209608
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Arjan Johannes Anton Beukman
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20190170657
- Publication date Jun 6, 2019
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20190056216
- Publication date Feb 21, 2019
- ASML Netherland B.V.
- Henricus Petrus Maria PELLEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20180195857
- Publication date Jul 12, 2018
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria PELLEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Focus Monitoring Arrangement and Inspection Apparatus Including suc...
- Publication number 20160097984
- Publication date Apr 7, 2016
- ASML NETHERLANDS B.V.
- Amandev SINGH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Apparatus and Methods, Methods of Manufacturing Devices
- Publication number 20160011523
- Publication date Jan 14, 2016
- ASML NETHERLANDS B.V.
- Amandev SINGH
- G01 - MEASURING TESTING
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20150131076
- Publication date May 14, 2015
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
Photon Source, Metrology Apparatus, Lithographic System and Device...
- Publication number 20150108373
- Publication date Apr 23, 2015
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20140233025
- Publication date Aug 21, 2014
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Inspection Apparatus, Lithographic Apparatus, Lithographic Processi...
- Publication number 20140211185
- Publication date Jul 31, 2014
- ASML NETHERLANDS B.V.
- Hugo Augustinus Joseph Cramer
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20140055788
- Publication date Feb 27, 2014
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Photon Source, Metrology Apparatus, Lithographic System and Device...
- Publication number 20130329204
- Publication date Dec 12, 2013
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
Metrology Method and Apparatus, and Device Manufacturing Method
- Publication number 20130100427
- Publication date Apr 25, 2013
- ASML NETHERLANDS B.V.
- Armand Eugene Albert KOOLEN
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus, alignment system, and device manufacturing...
- Publication number 20060215161
- Publication date Sep 28, 2006
- ASML NETHERLANDS B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20060066855
- Publication date Mar 30, 2006
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus with alignment subsystem, device manufacturi...
- Publication number 20050146699
- Publication date Jul 7, 2005
- ASML NETHERLANDS B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus with alignment subsystem, device manufacturi...
- Publication number 20040179184
- Publication date Sep 16, 2004
- ASML NETHERLANDS B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Henricus Petrus Maria Pellemans

Person

Patents Grantslast 30 patents

Inspection method and apparatus, lithographic apparatus, lithograph...

Method and apparatus for angular-resolved spectroscopic lithography...

Position metrology apparatus and associated optical elements

Alignment method and associated metrology device

Metrology sensor for position metrology

Inspection method and apparatus, lithographic apparatus, lithograph...

Method and apparatus for angular-resolved spectroscopic lithography...

Inspection method and apparatus, lithographic apparatus, lithograph...

Method and apparatus for angular-resolved spectroscopic lithography...

Inspection method and apparatus, lithographic apparatus, lithograph...

Inspection method and apparatus, lithographic apparatus, lithograph...

Focus monitoring arrangement and inspection apparatus including suc...

Inspection apparatus and methods, methods of manufacturing devices

Photon source, metrology apparatus, lithographic system and device...

Metrology method and apparatus, and device manufacturing method

Inspection apparatus, lithographic apparatus, lithographic processi...

Photon source, metrology apparatus, lithographic system and device...

Inspection method and apparatus, lithographic apparatus, lithograph...

Method of assessing a model of a substrate, an inspection apparatus...

Method and apparatus for angular-resolved spectroscopic lithography...

Inspection apparatus, lithographic apparatus, lithographic processi...

Calibration method and apparatus

Method and apparatus for angular-resolved spectroscopic lithography...

Metrology method and apparatus, lithographic apparatus, device manu...

Patents Applicationslast 30 patents

METROLOGY METHOD AND SYSTEM AND LITHOGRAPHIC SYSTEM

INSPECTION METHOD AND APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPH...

METROLOGY SYSTEM AND COHERENCE ADJUSTERS

METROLOGY METHOD AND LITHOGRAPHIC APPARATUSES

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

ALIGNMENT METHOD AND ASSOCIATED METROLOGY DEVICE

METROLOGY SENSOR FOR POSITION METROLOGY

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

Position Metrology Apparatus and Associated Optical Elements

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

Focus Monitoring Arrangement and Inspection Apparatus Including suc...

Inspection Apparatus and Methods, Methods of Manufacturing Devices

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

Photon Source, Metrology Apparatus, Lithographic System and Device...

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Inspection Apparatus, Lithographic Apparatus, Lithographic Processi...

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Photon Source, Metrology Apparatus, Lithographic System and Device...

Metrology Method and Apparatus, and Device Manufacturing Method

Lithographic apparatus, alignment system, and device manufacturing...

Method and apparatus for angular-resolved spectroscopic lithography...

Lithographic apparatus with alignment subsystem, device manufacturi...

Lithographic apparatus with alignment subsystem, device manufacturi...