Henricus Petrus Maria Pellemans

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,054,467
- Issue date Nov 8, 2011
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus lithographic apparatus, lithographi...
- Patent number 7,869,022
- Issue date Jan 11, 2011
- ASML Netherlands B.V.
- Johan Maria Van Boxmeer
- G02 - OPTICS
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 7,791,732
- Issue date Sep 7, 2010
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus, alignment system, and device manufacturing...
- Patent number 7,440,079
- Issue date Oct 21, 2008
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology apparatus, lithographic apparatus, process apparatus metr...
- Patent number 7,403,293
- Issue date Jul 22, 2008
- ASML Netherlands
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with alignment subsystem, device manufacturi...
- Patent number 7,002,667
- Issue date Feb 21, 2006
- ASML, Netherlands B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with alignment subsystem, device manufacturi...
- Patent number 6,995,831
- Issue date Feb 7, 2006
- ASML Netherlands B.V.
- Leon Martin Levasier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20120038929
- Publication date Feb 16, 2012
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Application
Calibration Method and Apparatus
- Publication number 20110178785
- Publication date Jul 21, 2011
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G01 - MEASURING TESTING
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20110128512
- Publication date Jun 2, 2011
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria Pellemans
- G01 - MEASURING TESTING
Information Patent Application
Metrology Method and Apparatus, Lithographic Apparatus, Device Manu...
- Publication number 20110043791
- Publication date Feb 24, 2011
- ASML NETHERLANDS B.V.
- Hendrik Jan Hidde Smilde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Assessing a Model of a Substrate, an Inspection Apparatus...
- Publication number 20110026032
- Publication date Feb 3, 2011
- ASML Netherland B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20110007314
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Application
Inspection Apparatus, Lithographic Apparatus, Lithographic Processi...
- Publication number 20100201963
- Publication date Aug 12, 2010
- ASML NETHERLANDS B.V.
- Hugo Augustinus Joseph Cramer
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus lithographic apparatus, lithographi...
- Publication number 20090021708
- Publication date Jan 22, 2009
- ASML NETHERLANDS B.V.
- Johan Maria Van Boxmeer
- G02 - OPTICS
Information Patent Application
Metrology apparatus, lithographic apparatus, process apparatus metr...
- Publication number 20070013921
- Publication date Jan 18, 2007
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology apparatus, lithographic apparatus, process apparatus, met...
- Publication number 20070002336
- Publication date Jan 4, 2007
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Henricus Petrus Maria Pellemans

Person

Patents Grantslast 30 patents

Method and apparatus for angular-resolved spectroscopic lithography...

Inspection method and apparatus lithographic apparatus, lithographi...

Method and apparatus for angular-resolved spectroscopic lithography...

Lithographic apparatus, alignment system, and device manufacturing...

Metrology apparatus, lithographic apparatus, process apparatus metr...

Lithographic apparatus with alignment subsystem, device manufacturi...

Lithographic apparatus with alignment subsystem, device manufacturi...

Patents Applicationslast 30 patents

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Calibration Method and Apparatus

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

Metrology Method and Apparatus, Lithographic Apparatus, Device Manu...

Method of Assessing a Model of a Substrate, an Inspection Apparatus...

Method and apparatus for angular-resolved spectroscopic lithography...

Inspection Apparatus, Lithographic Apparatus, Lithographic Processi...

Inspection method and apparatus lithographic apparatus, lithographi...

Metrology apparatus, lithographic apparatus, process apparatus metr...

Metrology apparatus, lithographic apparatus, process apparatus, met...