Henricus Wilhelmus Maria Van Buel

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Alignment and alignment marks
- Patent number 7,751,047
- Issue date Jul 6, 2010
- ASML Netherlands B.V.
- Fransiscus Godefridus Casper Bijnen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method
- Patent number 7,675,606
- Issue date Mar 9, 2010
- ASML Netherlands B.V.
- Enno Van Den Brink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,563,562
- Issue date Jul 21, 2009
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for 3D alignment in wafer scale integration
- Patent number 7,562,686
- Issue date Jul 21, 2009
- ASML Netherlands B.V.
- Keith Frank Best
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lithographic apparatus for imaging a front side or a back side of a...
- Patent number 7,480,028
- Issue date Jan 20, 2009
- ASML Netherlands B.V.
- Michael Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table with windows, method of measuring a position of a s...
- Patent number 7,463,337
- Issue date Dec 9, 2008
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method, method of measuring front to backside alignment e...
- Patent number 7,420,676
- Issue date Sep 2, 2008
- ASML Netherlands B.V.
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pre-aligning a substrate in a lithographic apparatus, device manufa...
- Patent number 7,349,071
- Issue date Mar 25, 2008
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pre-aligning a substrate in a lithographic apparatus, device manufa...
- Patent number 7,342,642
- Issue date Mar 11, 2008
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating a lithographic apparatus, alignment method, c...
- Patent number 7,253,884
- Issue date Aug 7, 2007
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, method of measuring a position of a substrate and...
- Patent number 7,251,018
- Issue date Jul 31, 2007
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calibration method for a lithographic apparatus and device manufact...
- Patent number 7,239,393
- Issue date Jul 3, 2007
- ASML Netherlands B.V.
- Arno Jan Bleeker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment tool, a lithographic apparatus, an alignment method, a de...
- Patent number 7,193,231
- Issue date Mar 20, 2007
- ASML Netherlands B.V.
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 7,113,258
- Issue date Sep 26, 2006
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,094,506
- Issue date Aug 22, 2006
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 7,064,807
- Issue date Jun 20, 2006
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of aligning a substrate, a computer program, a device manufa...
- Patent number 7,041,996
- Issue date May 9, 2006
- ASML Netherlands B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calibration methods, calibration substrates, lithographic apparatus...
- Patent number 6,936,385
- Issue date Aug 30, 2005
- ASML Netherlands B.V.
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, alignment method and device manufacturing m...
- Patent number 6,914,664
- Issue date Jul 5, 2005
- ASML Netherlands B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SENSOR, A TABLE AND LITHOGRAPHIC APPARATUS
- Publication number 20100321695
- Publication date Dec 23, 2010
- ASML NETHERLANDS B.V.
- Henricus Wilhelmus Maria VAN BUEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20090237635
- Publication date Sep 24, 2009
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic method
- Publication number 20090207399
- Publication date Aug 20, 2009
- ASML NETHERLANDS B.V.
- Alex F. Fong
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090075012
- Publication date Mar 19, 2009
- ASML NETHERLANDS B.V.
- Paulus Wilhelmus Van Dijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20080204683
- Publication date Aug 28, 2008
- ASML NETHERLANDS B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cover for shielding a portion of an arc lamp
- Publication number 20080170308
- Publication date Jul 17, 2008
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20070258080
- Publication date Nov 8, 2007
- ASML NETHERLANDS B.V.
- Enno Van Den Brink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pre-aligning a substrate in a lithographic apparatus, device manufa...
- Publication number 20060285095
- Publication date Dec 21, 2006
- ASML NETHERLANDS B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060275709
- Publication date Dec 7, 2006
- ASML NETHERLANDS B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus
- Publication number 20050140951
- Publication date Jun 30, 2005
- ASML NETHERLANDS B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Henricus Wilhelmus Maria Van Buel

Person

Patents Grantslast 30 patents

Alignment and alignment marks

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Method and system for 3D alignment in wafer scale integration

Lithographic apparatus for imaging a front side or a back side of a...

Substrate table with windows, method of measuring a position of a s...

Alignment method, method of measuring front to backside alignment e...

Pre-aligning a substrate in a lithographic apparatus, device manufa...

Pre-aligning a substrate in a lithographic apparatus, device manufa...

Method of calibrating a lithographic apparatus, alignment method, c...

Substrate table, method of measuring a position of a substrate and...

Calibration method for a lithographic apparatus and device manufact...

Alignment tool, a lithographic apparatus, an alignment method, a de...

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus

Method of aligning a substrate, a computer program, a device manufa...

Calibration methods, calibration substrates, lithographic apparatus...

Lithographic apparatus, alignment method and device manufacturing m...

Patents Applicationslast 30 patents

SENSOR, A TABLE AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND METHOD

Lithographic method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Cover for shielding a portion of an arc lamp

Lithographic apparatus and method

Pre-aligning a substrate in a lithographic apparatus, device manufa...

Lithographic apparatus and device manufacturing method

Lithographic apparatus