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Henrikus Herman Marie Cox
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Eindhoven, NL
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last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090303455
Publication date
Dec 10, 2009
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080246936
Publication date
Oct 9, 2008
ASML NETHERLANDS B.V.
Erik Roelof Loopstra
G05 - CONTROLLING REGULATING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060038968
Publication date
Feb 23, 2006
ASML NETHERLANDS B.V.
Nicolaas Rudolf Kemper
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, lorentz actuator, and device manufacturing...
Publication number
20050200208
Publication date
Sep 15, 2005
ASML, Netherlands B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY