Henry K. Chau

Follow

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Command trajectory for driving a stage with minimal vibration
- Patent number 6,320,345
- Issue date Nov 20, 2001
- Nikon Corporation
- Bausan Yuan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thin film detection method and apparatus
- Patent number 5,936,254
- Issue date Aug 10, 1999
- Nikon Research Corporation of America
- Arun A. Aiyer
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for macro defect detection using scattered light
- Patent number 5,859,698
- Issue date Jan 12, 1999
- Nikon Corporation
- Henry K. Chau
- G01 - MEASURING TESTING
Information Patent Grant
CMP variable angle in situ sensor
- Patent number 5,838,448
- Issue date Nov 17, 1998
- Nikon Corporation
- Arun A. Aiyer
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection method and apparatus using diffracted light
- Patent number 5,777,729
- Issue date Jul 7, 1998
- Nikon Corporation
- Arun A. Aiyer
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT SYSTEM THAT INCLUDES AN ENCODER AND AN INTERFEROMETER
- Publication number 20130182235
- Publication date Jul 18, 2013
- Nikon Corporation
- Ping-Wei Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY