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Henry N. Chapman
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Sunol, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Area X-ray or UV camera system for high-intensity beams
Patent number
7,672,430
Issue date
Mar 2, 2010
Lawrence Livermore National Security, LLC
Henry N. Chapman
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Figure correction of multilayer coated optics
Patent number
7,662,263
Issue date
Feb 16, 2010
EUV LLC
Henry N. Chapman
G01 - MEASURING TESTING
Information
Patent Grant
Tamper to delay motion and decrease ionization of a sample during s...
Patent number
7,236,565
Issue date
Jun 26, 2007
The Regents of the University of California
Richard A. London
G01 - MEASURING TESTING
Information
Patent Grant
High-efficiency spectral purity filter for EUV lithography
Patent number
7,050,237
Issue date
May 23, 2006
The Regents of the University of California
Henry N. Chapman
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method to repair localized amplitude defects in a EUV lithography m...
Patent number
6,967,168
Issue date
Nov 22, 2005
The EUV Limited Liability Corporation
Daniel G. Stearns
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Etched-multilayer phase shifting masks for EUV lithography
Patent number
6,875,543
Issue date
Apr 5, 2005
EUV Limited Liability Corporation
Henry N. Chapman
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Condenser for ring-field deep ultraviolet and extreme ultraviolet l...
Patent number
6,398,374
Issue date
Jun 4, 2002
The Regents of the University of California
Henry N. Chapman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Condenser for ring-field deep-ultraviolet and extreme-ultraviolet l...
Patent number
6,186,632
Issue date
Feb 13, 2001
The Regents of the University of California
Henry N. Chapman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Deformable mirror for short wavelength applications
Patent number
5,986,795
Issue date
Nov 16, 1999
Henry N. Chapman
G02 - OPTICS
Information
Patent Grant
Reflective optical imaging system with balanced distortion
Patent number
5,973,826
Issue date
Oct 26, 1999
Regents of the University of California
Henry N. Chapman
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Area x-ray or UV camera system for high-intensity beams
Publication number
20090116619
Publication date
May 7, 2009
Henry N. Chapman
G01 - MEASURING TESTING
Information
Patent Application
HIGH-EFFICIENCY SPECTRAL PURITY FILTER FOR EUV LITHOGRAPHY
Publication number
20060087738
Publication date
Apr 27, 2006
The Regents of the University of CA
Henry N. Chapman
B82 - NANO-TECHNOLOGY
Information
Patent Application
Tamper to delay motion and decrease ionization of a sample during s...
Publication number
20050276370
Publication date
Dec 15, 2005
The Regents of the University of California.
Richard A. London
G01 - MEASURING TESTING
Information
Patent Application
Figure correction of multilayer coated optics
Publication number
20040061868
Publication date
Apr 1, 2004
The Regents of the University of California.
Henry N. Chapman
G01 - MEASURING TESTING
Information
Patent Application
Etched-multilayer phase shifting masks for EUV lithography
Publication number
20040062998
Publication date
Apr 1, 2004
The Regents of the University of California.
Henry N. Chapman
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method to repair localized amplitude defects in a EUV lithography m...
Publication number
20030006214
Publication date
Jan 9, 2003
The Regents of the University of California.
Daniel G. Stearns
B82 - NANO-TECHNOLOGY