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Henry Shields
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San Pedro, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Laser-produced plasma EUV light source with pre-pulse enhancement
Patent number
6,973,164
Issue date
Dec 6, 2005
University of Central Florida Research Foundation, Inc.
Jeffrey S. Hartlove
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser-produced plasma EUV light source with isolated plasma
Patent number
6,933,515
Issue date
Aug 23, 2005
University of Central Florida Research Foundation
Jeffrey S. Hartlove
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Erosion reduction for EUV laser produced plasma target sources
Patent number
6,912,267
Issue date
Jun 28, 2005
University of Central Florida Research Foundation
Rocco A. Orsini
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Droplet target delivery method for high pulse-rate laser-plasma ext...
Patent number
6,855,943
Issue date
Feb 15, 2005
Northrop Grumman Corporation
Henry Shields
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Low vapor pressure, low debris solid target for EUV production
Patent number
6,835,944
Issue date
Dec 28, 2004
University of Central Florida Research Foundation
Rocco A. Orsini
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Laser-produced plasma EUV light source with isolated plasma
Publication number
20040262545
Publication date
Dec 30, 2004
Northrop Grumman Corporation
Jeffrey S. Hartlove
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser-produced plasma EUV light source with pre-pulse enhancement
Publication number
20040264512
Publication date
Dec 30, 2004
Northrop Grumman Corporation
Jeffrey R. Hartlove
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Erosion reduction for EUV laser produced plasma target sources
Publication number
20040086080
Publication date
May 6, 2004
Rocco A. Orsini
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Low vapor pressure, low debris solid target for EUV production
Publication number
20040071266
Publication date
Apr 15, 2004
Rocco A. Orsini
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Droplet target delivery method for high pulse-rate laser-plasma ext...
Publication number
20030223542
Publication date
Dec 4, 2003
Henry Shields
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR