Henry Yee-Shian TONG

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Taoyuan City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 12,114,412
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- G01 - MEASURING TESTING
Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 11,800,626
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- G01 - MEASURING TESTING
Information Patent Grant
EUV light source and apparatus for lithography
- Patent number 11,226,564
- Issue date Jan 18, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhan-Hong Yeh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser source device, extreme ultraviolet lithography device and method
- Patent number 11,158,989
- Issue date Oct 26, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Henry Yee-Shian Tong
- G01 - MEASURING TESTING
Information Patent Grant
Laser source device and extreme ultraviolet lithography device
- Patent number 10,624,196
- Issue date Apr 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Henry Yee-Shian Tong
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20230380044
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- G01 - MEASURING TESTING
Information Patent Application
LASER SOURCE DEVICE, EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE AND METHOD
- Publication number 20200245443
- Publication date Jul 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Henry Yee-Shian TONG
- G01 - MEASURING TESTING
Information Patent Application
LASER SOURCE DEVICE AND EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE
- Publication number 20200107428
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Henry Yee-Shian TONG
- G01 - MEASURING TESTING