Henryk Fiedorowicz

Follow

Person

Warszawa, PL

People

Patents Grantslast 30 patents

Information Patent Grant
Radiation source for extreme ultraviolet radiation, e.g. for use in...
- Patent number 6,469,310
- Issue date Oct 22, 2002
- ASML Netherlands B.V.
- Henryk Fiedorowicz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source for use in lithographic projection apparatus
- Patent number 6,452,194
- Issue date Sep 17, 2002
- ASML Netherlands B.V.
- Frederik Bijkerk
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Radiation source for use in lithographic projection apparatus
- Publication number 20010004104
- Publication date Jun 21, 2001
- Frederik Bijkerk
- B82 - NANO-TECHNOLOGY